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D6F Series MEMS Flow Sensors

Omron Electronics D6F MEMS Flow Sensors and Velocity Sensors are compact, highly reliable sensors with a unique cyclone flow structure that diverts particulate from the sensor element. As an alternative to differential pressure sensing or for detecting clogged filters, the D6F series is available in PCB-mounted, flange-mount, and connector models. The D6F-P 0.1 LPM version MEMS Flow Sensor is targeted at ultra low-flow applications and measures up to 200 LPM with a bypass set-up.

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Image	Part #	Mfr.	Description	Datasheet	Availability	Pricing (USD) Filter the results in the table by unit price based on your quantity.	Qty.	Type	For Use With	Range	Accuracy	Output Voltage	Operating Supply Voltage	Port Size	Housing Material
Flow Sensors MEMS FLOW SENSOR D6F-10A7D-000-0 Omron Electronics 1: $223.87 A tariff of 7% may be applied if shipping to the United States. 10In Stock	Mfr. Part # D6F-10A7D-000-0 Mouser Part # 653-D6F-10A7D-000-0	Omron Electronics	Flow Sensors MEMS FLOW SENSOR Learn More about Omron Electronics omrond6fp	Datasheet	10In Stock	$223.87 $205.75 A tariff of 7% may be applied if shipping to the United States.	Min.: 1 Mult.: 1	MEMS Flow Sensor	Air	0 L/min to 10 L/min	5 %		3 V to 3.6 V	13 mm	Polyphenylene Sulfide (PPS)
Flow Sensors MEMS Velocity Sensor Air 0-3m/Sec D6F-V03A1 Omron Electronics 1: $24.29 A tariff of 7% may be applied if shipping to the United States. 583In Stock	Mfr. Part # D6F-V03A1 Mouser Part # 653-D6F-V03A1	Omron Electronics	Flow Sensors MEMS Velocity Sensor Air 0-3m/Sec Learn More about Omron Electronics omron d6f v mems flow sensor	Datasheet	583In Stock	$24.29 $22.96 $21.99 $20.61 View $19.93 $19.43 $19.14 A tariff of 7% may be applied if shipping to the United States.	Min.: 1 Mult.: 1	Air Velocity Sensor	Air	0 m/s to 3 m/s	10 %	0 V to 2 V	3.15 V to 9.45 V	2 mm x 3 mm	Thermoplastic (TP)
Flow Sensors MEMS FLOW SENSOR D6F-50A7D-000-0 Omron Electronics 1: $223.87 A tariff of 7% may be applied if shipping to the United States. 8In Stock	Mfr. Part # D6F-50A7D-000-0 Mouser Part # 653-D6F-50A7D-000-0	Omron Electronics	Flow Sensors MEMS FLOW SENSOR Learn More about Omron Electronics omrond6fp	Datasheet	8In Stock	$223.87 $197.40 $197.39 $190.81 View $188.40 Quote A tariff of 7% may be applied if shipping to the United States.	Min.: 1 Mult.: 1	MEMS Flow Sensor	Air	0 L/min to 50 L/min	3 %		3 V to 3.6 V	18 mm	Polyphenylene Sulfide (PPS)
Flow Sensors MEMS Flow Flange Mt 0-0.1 LPM PCB Term D6F-P0001A1 Omron Electronics 1: $58.17 A tariff of 7% may be applied if shipping to the United States. 297In Stock	Mfr. Part # D6F-P0001A1 Mouser Part # 653-D6F-P0001A1	Omron Electronics	Flow Sensors MEMS Flow Flange Mt 0-0.1 LPM PCB Term Learn More about Omron Electronics omron d6f p mass flow sensors	Datasheet	297In Stock	$58.17 $50.24 $50.21 $47.74 $46.39 A tariff of 7% may be applied if shipping to the United States.	Min.: 1 Mult.: 1	MEMS Air Flow Sensor	Air	0 L/min to 0.1 L/min	2 %	4 V	4.75 V to 9.45 V		Polybutylene Terephthalate (PBT)
Flow Sensors MEMS MassFlow Sensor Air 0-1 LPM PCB Ter D6F-P0010A1 Omron Electronics 1: $58.34 A tariff of 7% may be applied if shipping to the United States. 1,054In Stock 2,375On Order	Mfr. Part # D6F-P0010A1 Mouser Part # 653-D6F-P0010A1	Omron Electronics	Flow Sensors MEMS MassFlow Sensor Air 0-1 LPM PCB Ter Learn More about Omron Electronics omron d6f p mass flow sensors	Datasheet	1,054In Stock 2,375On Order On Order Ship Dates Mfr. #: D6F-P0010A1 Stock: 1,054 Can Ship Immediately On Order: 1,075 Expected 10/23/2026 1,300 Expected 1/1/2027 Factory Lead-Time: 26 Weeks	$58.34 $53.92 $51.86 $49.80 View $49.09 $49.01 A tariff of 7% may be applied if shipping to the United States.	Min.: 1 Mult.: 1	Mass Air Flow Sensor	Air	0 L/min to 1 L/min			4.75 V to 9.45 V		Polybutylene Terephthalate (PBT)
Flow Sensors MEMS Velocity Sensor Air 0-4 Meter/Sec D6F-W04A1 Omron Electronics 1: $93.33 A tariff of 7% may be applied if shipping to the United States. 278In Stock	Mfr. Part # D6F-W04A1 Mouser Part # 653-D6F-W04A1	Omron Electronics	Flow Sensors MEMS Velocity Sensor Air 0-4 Meter/Sec Learn More about Omron Electronics omron d6f w mems flow sensors	Datasheet	278In Stock	$93.33 $86.59 $84.07 $81.06 $79.78 A tariff of 7% may be applied if shipping to the United States.	Min.: 1 Mult.: 1	Air Velocity Sensor	Air	0 m/s to 4 m/s	5 %	1 V to 5 V	10.8 V to 26.4 V	2.6 mm x 5 mm	Polyphenylene Sulfide (PPS)
Flow Sensors MatingCable for MEMS FlowSns D6F-03A3-000 D6F-CABLE2 Omron Electronics 1: $10.77 A tariff of 7% may be applied if shipping to the United States. 291In Stock	Mfr. Part # D6F-CABLE2 Mouser Part # 653-D6F-CABLE2	Omron Electronics	Flow Sensors MatingCable for MEMS FlowSns D6F-03A3-000 Learn More about Omron Electronics omrond6fp	Datasheet	291In Stock	$10.77 $9.75 $9.37 $8.92 View $8.61 $8.34 $7.76 $7.54 A tariff of 7% may be applied if shipping to the United States.	Min.: 1 Mult.: 1	Accessory, Cable	Cable for MEMS Mass Flow Sensor D6F-03A3-000			1 V to 5 V
Flow Sensors MEMS Mass FlowSensor Air 0-1LPM Connecto D6F-P0010A2 Omron Electronics 1: $59.89 A tariff of 7% may be applied if shipping to the United States. 221In Stock 325Expected 11/6/2026	Mfr. Part # D6F-P0010A2 Mouser Part # 653-D6F-P0010A2	Omron Electronics	Flow Sensors MEMS Mass FlowSensor Air 0-1LPM Connecto Learn More about Omron Electronics omron d6f p mass flow sensors	Datasheet	221In Stock 325Expected 11/6/2026	$59.89 $55.30 $52.88 $49.51 $49.01 A tariff of 7% may be applied if shipping to the United States.	Min.: 1 Mult.: 1	Mass Air Flow Sensor	Air	0 L/min to 1 L/min		0 V to 3.1 V	4.75 V to 9.45 V		Polybutylene Terephthalate (PBT)
Flow Sensors MEMS Flow Sensor Manifold Mount D6F-P0010AM2 Omron Electronics 1: $63.31 A tariff of 7% may be applied if shipping to the United States. 88In Stock	Mfr. Part # D6F-P0010AM2 Mouser Part # 653-D6F-P0010AM2	Omron Electronics	Flow Sensors MEMS Flow Sensor Manifold Mount Learn More about Omron Electronics omron d6f p mass flow sensors	Datasheet	88In Stock	$63.31 $57.18 $54.37 $51.58 View $50.29 $49.32 Quote A tariff of 7% may be applied if shipping to the United States.	Min.: 1 Mult.: 1	MEMS Air Flow Sensor	Air	0 L/min to 1 L/min	2 %	4 V	4.75 V to 9.45 V		Polybutylene Terephthalate (PBT)
Flow Sensors MEMS Velocity Sensor Air 0-1 Meter/Sec D6F-W01A1 Omron Electronics 1: $93.54 A tariff of 7% may be applied if shipping to the United States. 139In Stock	Mfr. Part # D6F-W01A1 Mouser Part # 653-D6F-W01A1	Omron Electronics	Flow Sensors MEMS Velocity Sensor Air 0-1 Meter/Sec Learn More about Omron Electronics omron d6f w mems flow sensors	Datasheet	139In Stock	$93.54 $86.77 $83.36 $81.25 $79.78 A tariff of 7% may be applied if shipping to the United States.	Min.: 1 Mult.: 1	Air Velocity Sensor	Air	0 m/s to 1 m/s	5 %	1 V to 5 V	10.8 V to 26.4 V	2.6 mm x 5 mm	Polyphenylene Sulfide (PPS)
Flow Sensors MEMS Velocity Sensor 10m/sec D6F-W10A1 Omron Electronics 1: $93.73 A tariff of 7% may be applied if shipping to the United States. 42In Stock 40Expected 8/17/2027	Mfr. Part # D6F-W10A1 Mouser Part # 653-D6F-W10A1	Omron Electronics	Flow Sensors MEMS Velocity Sensor 10m/sec Learn More about Omron Electronics omron d6f w mems flow sensors	Datasheet	42In Stock 40Expected 8/17/2027	$93.73 $86.95 $83.22 $81.41 $79.78 A tariff of 7% may be applied if shipping to the United States.	Min.: 1 Mult.: 1	Air Velocity Sensor	Air	0 m/s to 10 m/s	5 %	6 V	10.8 V to 26.4 V	2.6 mm x 5 mm	Polyphenylene Sulfide (PPS)
Flow Sensors MEMS air 0-10L/min D6F-10A5-000 Omron Electronics 1: $263.06 A tariff of 7% may be applied if shipping to the United States. 2In Stock 5Expected 10/23/2026	Mfr. Part # D6F-10A5-000 Mouser Part # 653-D6F-10A5-000	Omron Electronics	Flow Sensors MEMS air 0-10L/min Learn More about Omron Electronics omrond6fp	Datasheet	2In Stock 5Expected 10/23/2026	$263.06 $246.57 $244.78 A tariff of 7% may be applied if shipping to the United States.	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 10 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V	5 mm	Thermoplastic (TP), Aluminum alloy
Flow Sensors MEMS Airflow Sensor Air 0-10 LPM D6F-10A61-000 Omron Electronics 1: $267.28 A tariff of 7% may be applied if shipping to the United States. 1In Stock 23Expected 1/1/2027	Mfr. Part # D6F-10A61-000 Mouser Part # 653-D6F-10A61-000	Omron Electronics	Flow Sensors MEMS Airflow Sensor Air 0-10 LPM Learn More about Omron Electronics omrond6fp	Datasheet	1In Stock 23Expected 1/1/2027	$267.28 $250.57 $249.01 A tariff of 7% may be applied if shipping to the United States.	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 10 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V		Thermoplastic (TP)
Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR D6F-20A6-000 Omron Electronics 1: $278.85 A tariff of 7% may be applied if shipping to the United States. 38On Order	Mfr. Part # D6F-20A6-000 Mouser Part # 653-D6F-20A6-000	Omron Electronics	Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR Learn More about Omron Electronics omron d6f gas mass flow sensors	Datasheet	38On Order On Order Ship Dates Mfr. #: D6F-20A6-000 Stock: 0 On Order: 17 Expected 10/23/2026 21 Expected 1/1/2027 Factory Lead-Time: 26 Weeks	$278.85 $261.37 $245.98 $244.78 A tariff of 7% may be applied if shipping to the United States.	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 20 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V	6.35 mm	Thermoplastic (TP), Aluminum alloy
Flow Sensors MEMS Airflow Sensor Air 0-20 LPM D6F-20A61-000 Omron Electronics 1: $278.85 A tariff of 7% may be applied if shipping to the United States. 2In Stock 2Expected 12/22/2026	Mfr. Part # D6F-20A61-000 Mouser Part # 653-D6F-20A61-000	Omron Electronics	Flow Sensors MEMS Airflow Sensor Air 0-20 LPM Learn More about Omron Electronics omrond6fp	Datasheet	2In Stock 2Expected 12/22/2026	$278.85 $261.37 $249.81 $244.78 A tariff of 7% may be applied if shipping to the United States.	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 20 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V		Thermoplastic (TP)
Flow Sensors MEMS FLOW SENSOR D6F-20A7D-000-0 Omron Electronics 1: $189.78 A tariff of 7% may be applied if shipping to the United States. 6In Stock	Mfr. Part # D6F-20A7D-000-0 Mouser Part # 653-D6F-20A7D-000-0	Omron Electronics	Flow Sensors MEMS FLOW SENSOR Learn More about Omron Electronics omrond6fp	Datasheet	6In Stock	$189.78 $184.64 $180.30 $179.13 View Quote A tariff of 7% may be applied if shipping to the United States.	Min.: 1 Mult.: 1	MEMS Flow Sensor	Air	0 L/min to 20 L/min	5 %		3 V to 3.6 V	13 mm	Polyphenylene Sulfide (PPS)
Flow Sensors Cable for D6F-P MEMS Flow Sensors D6F-CABLE1 Omron Electronics 1: $10.46 A tariff of 7% may be applied if shipping to the United States. 67In Stock 102Expected 11/6/2026	Mfr. Part # D6F-CABLE1 Mouser Part # 653-D6F-CABLE1	Omron Electronics	Flow Sensors Cable for D6F-P MEMS Flow Sensors Learn More about Omron Electronics omrond6fp	Datasheet	67In Stock 102Expected 11/6/2026	$10.46 $9.75 $9.37 $8.92 View $8.61 $8.26 $8.00 $7.67 $7.54 A tariff of 7% may be applied if shipping to the United States.	Min.: 1 Mult.: 1	Accessory, Cable	Cable for MEMS Air Flow Sensor D6F-10A, -20A, -50A
Flow Sensors CABLE FOR D6F D6F-CABLE3 Omron Electronics 1: $10.77 A tariff of 7% may be applied if shipping to the United States. 39In Stock	Mfr. Part # D6F-CABLE3 Mouser Part # 653-D6F-CABLE3	Omron Electronics	Flow Sensors CABLE FOR D6F Learn More about Omron Electronics omrond6fp	Datasheet	39In Stock	$10.77 $9.75 $9.37 $8.81 View $8.61 $7.83 $7.71 $7.37 A tariff of 7% may be applied if shipping to the United States.	Min.: 1 Mult.: 1	Accessory, Cable	MEMS Flow Sensor
Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR D6F-10A6-000 Omron Electronics 1: $279.11 A tariff of 7% may be applied if shipping to the United States. 43Expected 11/20/2026	Mfr. Part # D6F-10A6-000 Mouser Part # 653-D6F-10A6-000	Omron Electronics	Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR Learn More about Omron Electronics omron d6f gas mass flow sensors	Datasheet	43Expected 11/20/2026	$279.11 $261.62 $250.12 $244.78 A tariff of 7% may be applied if shipping to the United States.	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 10 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V	6.35 mm	Thermoplastic (TP), Aluminum alloy
Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR D6F-50A6-000 Omron Electronics 1: $278.84 A tariff of 7% may be applied if shipping to the United States. 8Expected 11/27/2026	Mfr. Part # D6F-50A6-000 Mouser Part # 653-D6F-50A6-000	Omron Electronics	Flow Sensors MEMS AIRFLOW SENSOR UP TO 50slpm LW PWR Learn More about Omron Electronics omron d6f gas mass flow sensors	Datasheet	8Expected 11/27/2026	$278.84 $261.37 $250.01 $244.78 A tariff of 7% may be applied if shipping to the United States.	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 50 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V	6.35 mm	Thermoplastic (TP), Aluminum alloy
Flow Sensors MEMS Micro-Flow Sensor D6F-05N7-000 Omron Electronics 1: $291.06 A tariff of 7% may be applied if shipping to the United States. Non-Stocked Lead-Time 28 Weeks	Mfr. Part # D6F-05N7-000 Mouser Part # 653-D6F-05N7-000	Omron Electronics	Flow Sensors MEMS Micro-Flow Sensor Learn More about Omron Electronics omron d6f gas mass flow sensors	Datasheet	Non-Stocked Lead-Time 28 Weeks	$291.06 $260.90 A tariff of 7% may be applied if shipping to the United States.	Min.: 1 Mult.: 1	Micro-Flow Sensor	City Gas	0 L/min to 5 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V
Flow Sensors MEMS air 0-50L/min D6F-50A5-000 Omron Electronics 1: $278.85 A tariff of 7% may be applied if shipping to the United States. Non-Stocked Lead-Time 26 Weeks	Mfr. Part # D6F-50A5-000 Mouser Part # 653-D6F-50A5-000	Omron Electronics	Flow Sensors MEMS air 0-50L/min Learn More about Omron Electronics omron d6f gas mass flow sensors	Datasheet	Non-Stocked Lead-Time 26 Weeks	$278.85 $261.37 $250.01 $244.78 A tariff of 7% may be applied if shipping to the United States.	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 50 L/min	3 %	1 V to 5 V	10.8 V to 26.4 V	5 mm	Thermoplastic (TP), Aluminum alloy
Flow Sensors FLOW SENSOR D6F-50A61-000 Omron Electronics 1: $269.16 A tariff of 7% may be applied if shipping to the United States. Non-Stocked Lead-Time 26 Weeks	Mfr. Part # D6F-50A61-000 Mouser Part # 653-D6F-50A61-000	Omron Electronics	Flow Sensors FLOW SENSOR	Datasheet	Non-Stocked Lead-Time 26 Weeks	$269.16 $255.65 A tariff of 7% may be applied if shipping to the United States.	Min.: 1 Mult.: 1	MEMS Mass Flow Sensor	Air	0 L/min to 50 L/min
Flow Sensors MEMS FLOW SENSOR D6F-70AB71D-000-0 Omron Electronics 10: $205.75 A tariff of 7% may be applied if shipping to the United States. Non-Stocked Lead-Time 26 Weeks	Mfr. Part # D6F-70AB71D-000-0 Mouser Part # 653-D6F-70AB71D-0000	Omron Electronics	Flow Sensors MEMS FLOW SENSOR Learn More about Omron Electronics omrond6fp	Datasheet	Non-Stocked Lead-Time 26 Weeks	$205.75 A tariff of 7% may be applied if shipping to the United States.	Min.: 10 Mult.: 10	MEMS Flow Sensor	Air	0 L/min to 70 L/min	3 %		3 V to 3.6 V	18 mm	Polyphenylene Sulfide (PPS)
Flow Sensors D6FZ-FGT Mntg Bracket Omron Automation and Safety D6FZ-FC03 D6FZ-FC03 Omron Automation and Safety 1: $57.31 Non-Stocked	Mfr. Part # D6FZ-FC03 Mouser Part # 653-D6FZ-FC03	Omron Automation and Safety	Flow Sensors D6FZ-FGT Mntg Bracket	Datasheet	Non-Stocked	$57.31 $49.39 $46.68 $43.55 View $41.20 $40.12	Min.: 1 Mult.: 1

D6F Series MEMS Flow Sensors

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